Ellipsometry
As part of the solutions offered by Alava Ingenieros, spectroscopic ellipsometry is a non-destructive optical technique that allows characterizing the thickness of thin layers and surfaces. Depending on the type of material being measured, this technique allows measurements from a few Angstrom to several tens of microns. It is an essential technique in semiconductor manufacturing, and with a wide range of products, Alava Ingenieros provides desktop solutions for R&D to automated solutions for production.
Description
Alava Ingenieros offers the most suitable technique for the characterization of thin films. Spectroscopic ellipsometry is a surface-sensitive, non-destructive and non-intrusive optical technique widely used for the characterization of thin films and surfaces. It is based simply on the change of polarization state of light when reflected obliquely from a thin film. Depending on the type of material, spectroscopic ellipsometers can measure thicknesses from a few Angstroms to several microns. It is also a good technique for measuring multilayers.
Spectroscopic ellipsometry allows characterization of a wide range of thin film properties, such as layer thickness, thin film properties, such as layer thickness, optical properties (n,k), optical bandwidth, layer interface and roughness, film composition, depth and area uniformity, etc.
The materials that can be analyzed by ellipsometry are various and have different characteristics, including semiconductors, polymers, dielectrics, organic compounds and metals, etc. Ellipsometry can also be used to study the solid-liquid or liquid-liquid interface.
HORIBA spectroscopic ellipsometers use innovative technology to perform high-frequency polarization modulation measurements without any mechanical movement, providing faster characterization, wider range and higher accuracy compared to conventional ellipsometers.
AutoSE
This is a spectroscopic ellipsometer for characterization in industrial processes. It is a very easy to use equipment, which allows to automate analysis, so that the operator only has to place the sample, press a button and directly obtain a result easy to understand and without further post-processing.
SmartSE
A powerful, economical and easy to use equipment. The SmartSE is the entry level equipment of the ellipsometry range offered by Alava Ingenieros, an economical equipment, which allows fast and accurate measurements, from a few Angstroms up to 20 microns. It covers a range from 450 to 1000nm, and allows to add multiple options, such as full automation, Matrix Mueller, etc.
UviselPlus
The UVISEL Plus ellipsometer offers the best combination of modularity and performance for advanced characterization of thin films, surfaces and interfaces.
The new UVISEL Plus includes the latest acquisition technology designed to measure faster and more accurately than ever before. FastAcq, the latest acquisition technology is based on dual modulation and is designed for real-world thin film characterization. Based on new electronics, data processing and high-speed monochromator, the new FastAcq technology allows a sample measurement from 190 to 2100 nm to be completed in 3 minutes, with high resolution.
Designed to offer greater flexibility in thin film measurements, the UVISEL Plus offers patterned sample microdots, variable angle, automatic mapping platform and a variety of accessories, making it upgradeable to meet all your application and budget needs.
The modular design of the UVISEL Plus allows it to be used as a benchtop metrology tool or for on-site integration into process chambers or production tape machines.
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More information about Ellipsometry
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